Interfacial Reactions between HfO2 Films Prepared by Atomic-Layer-Deposition and an InP Substrate Using Postnitridation with NH3 Vapor
Kang, YS (Kang, Y. S.), Kim, CY (Kim, C. Y.), mann-ho cho, An, CH (An, C. -H.), Kim, H (Kim, H.), Seo, JH (Seo, J. H.), Kim, CS (Kim, C. S.), Lee, TG (Lee, T. G.), DAE HONG KO
ELECTROCHEMICAL AND SOLID STATE LETTERS, v.15, no.4, pp.G9-G11