Effects of reoxidation on band alignment in N-incorporated SiON films as a function of sequential thermal annealing in NO and N H3
Lee, W.J. , cho mann-ho, Chung, K.B. , Lee, Y.S. , Kim, D.C. , Choi, S.Y. , Chung, U.I. , Moon, J.T.
Applied Physics Letters, v.93, no.1, pp.012901-012901