Interfacial reaction depending on the stack structure of Al2O3 and HfO2 during film growth and postannealing
Cho, MH, Chung, KB, Chang, HS, Moon, DW, Park, SA, Kim, YK, Jeong, K, Whang, CN, Lee, DW, Ko, DH, Doh, SJ, Lee, JH, Lee, NI
APPLIED PHYSICS LETTERS, v.85, pp.4115-4117