Oxygen distribution in the heteroepitaxially grown Y2O3 films on Si substrates
Kim, HB, mann-ho cho, Whangbo, SW, Chung Nam WHANG,, Choi, SC, Choi, WK, Song, JH, Kim, SO
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.142, no.3, pp.393-396