APS March Meeting 2014
Changes in surface chemical structure of BF3 plasma doped Si0.7Ge0.3 films
American Physical Society
Jinwon Ma, Woo-Jung Lee, Jungmin Bae, Seunghoon Oh, Jeonghun Kim, Yuseon Kang, mann-ho cho, DAE HONG KO, Yungseo Ahn, Hyungsub Kim, Sang-Il Seo, Nam-Hun Kim