Growth kinetics of atomic layer deposited Hf silicate-like films using Hf[N (CH3)(2)(C2H5](4) and SiH[N(CH3)(2)](3) precursors via an H2O oxidant
Chung, KB, cho mann-ho, Moon, DW, Suh, DC, Ko, DH, Hwang, U, Kang, HJ
ELECTROCHEMICAL AND SOLID STATE LETTERS, v.10, pp.G1-G4